This course introduces students to the multi-disciplinary, and exciting field of MicroElectroMechanical Systems (MEMS). It teaches the underlying physical principles, methods of fabrication (hard and soft lithography techniques, thin-film vacuum deposition, and materials printing) and applications of a broad range of devices and systems including biomedical systems (BioMEMS). The course emphasizes teamwork and active learning. Students use fabrication facilities to build simple MEMS structures and to image them.
Prerequisites: introductory physics and calculus. (4 credits)